Selection of kinetic energy of laser-ablated particles and its application for deposition of Au, Pt and Ag thin films

Abstract Controlling the kinetic energy of deposition species is an effective way to improve a thin film's physical properties. An apparatus that can select the kinetic energy of laser-ablated particles was developed. It was demonstrated that the energy of the laser-ablated particles was selected by chopping with the slit of a rotating disk. The energy profile of each ablated particle is illustrated, and the relationships between the selected velocity region and the selection conditions, such as disk rotation speed and delay time, are demonstrated. This apparatus was applied to the deposition of Au, Pt and Ag thin films. This process was also useful to improve surface morphology because the number of droplets on these films drastically decreased.