An Auger depth profile analysis of a sputtered Fe-Ti multilayer structure

Abstract A deconvolution process is used to discuss the peak-to-peak height curves obtained during the depth profile analysis of a sputtered Fe-Ti multilayer sample. The modifications induced by the inelastic mean free path, the roughness and the mixing effect are taken into account and enable more accurate information to be obtained on the main constituent signals. In addition, the positions of the C, O and Ar impurities are analysed.