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A Novel Combinatorial Approach to the Ferroelectric Properties in Hf x Zr 1− x O 2 Deposited by Atomic Layer Deposition
A Novel Combinatorial Approach to the Ferroelectric Properties in Hf x Zr 1− x O 2 Deposited by Atomic Layer Deposition
2021
Yong Chan Jung
Jaidah Mohan
Su Min Hwang
Jin Hyun Kim
Dan N. Le
Akshay Sahota
Namhoon Kim
Heber Hernandez-Arriaga
Jean François Veyan
Harrison Sejoon Kim
Si Joon Kim
Rino Choi
Jiyoung Kim
Keywords:
Atomic layer deposition
Ferroelectricity
Analytical chemistry
Materials science
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