Получение нанокомпозитных покрытий на основе системы Ti-Al-Si-N с помощью двух магнетронов

Ti-Al-Si-N.Nanocomposite coatings on the basis of the system Ti-Al-Si-N have been obtained by vacuum magnetron deposition at simultaneous operation of two magnetrons. Influence of magnetron sputtering parameters of various targets on chemical composition and microhardness of coatings was studied. Phase composition and average size of subgrains of the main phase in the obtained TiAlSiN coatings was determined by X-ray analysis