Flexible MEMS probe cards for three-dimensional probing

The results of examining substrate performance in the development of an integrated circuit membrane probe card are presented. Silicon, glass, Kapton™ and HDPI2525™ polyimide are examined as substrate materials, each having its own individual advantages. The fabricated device involved a simple electroplated design with good electrical addressability and excellent mechanical properties. Comparisons are made between the different substrate materials; potential devices and situations where each could be implemented are provided. Silicon gives optimum adhesion, glass provides excellent alignment and Kapton™ is useful for significant z-plane deflection.