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Integrated BST capacitors and PZT actuators in tunable MW applications
Integrated BST capacitors and PZT actuators in tunable MW applications
2008
Boettger
Hennings
Kuegeler
Waser
Keywords:
Capacitor
Materials science
Actuator
Binary search tree
Band-pass filter
Voltage
Resonance
dielectric thin films
Optoelectronics
Correction
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