Apparatus for deposition of organic layers and methods for fabricating an organic light emitting display device using the apparatus for depositing organic layers

An apparatus for deposition of organic layers (1) comprising: a conveying unit having a transfer unit (430), a first feed unit (410) and a second conveying unit (420); a charging unit (200) for securing a substrate (2) on the transfer unit (430); a deposition unit (100) having a chamber (101) and at least a module for the deposition of organic layers (100-1, ..., 100-11, 900); and between the charging unit (200) and the deposition unit (100) measuring unit located (10) for measuring position information of the substrate (2) prior to deposition of an organic layer on the substrate (2); and an unloading unit (300) for separating the substrate (2) on which the deposition has been completed, from the transfer unit (430), wherein the transfer unit (430) is configured such that it cyclically between the first conveying unit (410) and the second transport unit (420) moves and said fixed on the transfer unit substrate (2) is designed so that it during the transfer by the first transfer unit (410) of the at least one assembly for deposition of organic layers (100-1,. .., 100-11, 900) is spaced.