磁気を援用した窒化けい素セラミック部品内面のメカノケミカルポリシング(機械要素,潤滑,工作,生産管理など)

This study discusses the finishing mechanism of a magnetic field assisted mechanochemical polishing process using Cr2O3 abrasive mixed with iron particles, which was proposed for internal finishing of Si3N4 fine ceramic tubes. According to the finishing experiments, the iron particles rotate with the magnetic field and rub against the inner surface of the tube immediately after the finishing process begins. Initially, some of the iron particles adhere to the surface with the rolling nonmagnetic Cr2O3 abrasive. The Cr2O3 abrasive becomes embedded in the iron particles, which are softened by the friction heat of the finishing process. Relative motion is generated between the Cr2O3 abrasive and the finished surface, mechanically removing both the initial deposits of iron particles. This achieves smooth internal finishing of the tube without contaminating constituent components of the tube material.