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Oxidation of Pure Si3N4: Spectroscopic Ellipsometry and Glancing Angle X-Ray Diffraction Studies
Oxidation of Pure Si3N4: Spectroscopic Ellipsometry and Glancing Angle X-Ray Diffraction Studies
1993
Jiaxin Chen
H. Arwin
Maiken Heim
J. Sjöberg
Keywords:
Ellipsometry
X-ray crystallography
Crystallography
Materials science
Devitrification
Analytical chemistry
spectroscopic ellipsometry
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