The design of a versatile scanning proton microprobe of high resolution and efficiency

Abstract The designer of a scanning proton (or nuclear) microprobe must make many decisions, some of which may be compromises. There is a wide range of lens types and configurations. Microprobe performance will depend on performance of the accelerator and its ion source, on stability and control of the lens current supply, on the nature of the microprobe supports, on the vacuum system, on magnetic shielding and connection to the accelerator. There are many possible modes of observation and analysis to be considered when the specimen chamber is designed and a versatile chamber should make provision for most of them. They include optical microscopy of front and back surfaces of the specimen, secondary electron imaging, X-Ray imaging, channelling contrast microscopy, Rutherford backscattering and forward scattering, nuclear reaction analysis and scanning transmission ion microscopy in brightfield and darkfield modes. Microprobe performance will also inevitably depend on the ease of operation and the extent to which the operator has been considered in the overall design and layout of the microprobe. The equally important considerations involved in data collection and analysis are discussed in a second paper.