A Kind of Non-Contact Measurement System for Areal Surface Texture

For the measurement of areal surface texture, a non-contact measurement method for areal surface texture based on the co-integration of optical microscopy image measurement and white light microscopy interference measurement is proposed, which measures not only 2D size of length but also 3D surface texture. Based on this method, a 2D&3D optical microscopy measurement system for areal surface texture has been developed. It consists of compound optical microscopy imaging system, 3D precision displacement system, hardware circuit, and corresponding software. The practicality and effectiveness of the proposed method of measurement have been verified by the measurement results.