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Image Processing for Quality Enhancement of 2D Dopant Distribution Maps of MOSFET's using Electron Holography
Image Processing for Quality Enhancement of 2D Dopant Distribution Maps of MOSFET's using Electron Holography
2003
Andreas Lenk
U. Mühle
Hannes Lichte
Keywords:
Analytical chemistry
MOSFET
Electron holography
Image processing
Materials science
Dopant
Quercus arizonica
Scanning electron microscope
Botany
Fagaceae
Correction
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