High speed silicon modulators on 300 mm SOI wafers

First demonstrations of high speed silicon optical modulators fabricated on 300 mm silicon-on-insulator (SOI) wafers in CMOS foundry are presented. Both ring resonator and Mach Zehnder structures show 10 Gbit/s modulation. Small signal electro-optical bandwidth up to 20 GHz has been achieved, demonstrating the possibility of 40 Gbps data-rate transmission.