Plasma processing system for producing coatings

2011 
The invention relates to an apparatus and a method for the treatment of layers having a closed relative to the outer atmospheric pressure plasma zone. The apparatus comprises a plasma reactor with a substrate carrier in the shape of a container receiving device and a closure member which is connected to the substrate support via a lifting device.
    • Correction
    • Source
    • Cite
    • Save
    • Machine Reading By IdeaReader
    0
    References
    0
    Citations
    NaN
    KQI
    []