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Modeling of Microelectromechanical Systems Diaphragm Based Acoustic Sensor
Modeling of Microelectromechanical Systems Diaphragm Based Acoustic Sensor
2018
Vasudha Hegde
Narendra Chaulagain
H. M. Ravikumar
Sonu Mishra
Siva Yellampalli
Keywords:
Microelectromechanical systems
Diaphragm (structural system)
Electronic engineering
Materials science
Acoustics
Natural frequency
acoustic sensor
Piezoelectricity
Correction
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