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EUV scatterometry-based measurement method for the determination of phase roughness
EUV scatterometry-based measurement method for the determination of phase roughness
2013
Rikon Chao
Eric M. Gullikson
Michael Goldstein
Frank Goodwin
Ranganath Teki
Andy Neureuther
Patrick Naulleau
Keywords:
Surface finish
Materials science
Extreme ultraviolet lithography
Optics
Remote sensing
measurement method
Correction
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