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Gettering of Cu to voids induced by H+ implantation in SIMOX substrate
Gettering of Cu to voids induced by H+ implantation in SIMOX substrate
1997
Miao Zhang
Cl Lin
Plf Hemment
K. Gutjahr
U. Gösele
Keywords:
Getter
Substrate (chemistry)
Electrochemistry
Metallurgy
Materials science
Void (astronomy)
Correction
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