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Nondestructive nanofabrication on monocrystalline silicon via site-controlled formation and removal of oxide mask
Nondestructive nanofabrication on monocrystalline silicon via site-controlled formation and removal of oxide mask
2018
Guangran Guo
Jiaming Li
Changbang Deng
Qipei He
Qingyuan Yu
Chao Zhou
Xiaoxiao Liu
Shulan Jiang
Lei Chen
Bingjun Yu
Linmao Qian
Keywords:
Nanolithography
Chemistry
Analytical chemistry
Oxide
Monocrystalline silicon
Nanotechnology
Optics
Correction
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