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The Investigation of Sputtered Amorphous Silicon Films for MEMS and NEMS Applications
The Investigation of Sputtered Amorphous Silicon Films for MEMS and NEMS Applications
2016
Du Bo
Ma Jinyi
Jiao Xiangquan
Zhang Rui
Zhong-Hui
Shi Yu
Keywords:
Amorphous silicon
Nanoelectromechanical systems
Nanotechnology
Materials science
Inorganic chemistry
Microelectromechanical systems
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