INTEGRATEDOPTICSON SILICONSUBSTRATEFOR MICROWAVE APPLICATIONS

Integrated optics onsilicon substrate foruseasnon-perturbative control ofmicrowave devices is described. Insilica, aburied silicon nitride channel waveguide, with1dB/cmpropagation losses ata wavelength of0.82gim, wasmonolithically integrated withasimple coplanar microwave waveguide switch inorder todemonstrate thehigheffi1ciency oftheintegrated device applied tophased array antenna systems.