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Novel depolymerizable topcoat for immersion lithography
Novel depolymerizable topcoat for immersion lithography
2006
Peng Zhang
Scott Jeffrey Weigel
Tom Braymer
Tom Markley
Brenda Ross
Manuel Jaramillo
Shawn Cassel
Oleg Kritsun
Uzodinma Okoroanyanwu
Keywords:
Immersion lithography
Nanotechnology
Materials science
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