A new high sensitivity analysis method for deuterium by D(12C, p)13C and its application

Abstract Using the D( 12 C, p) 13 C nuclear reaction, we have established a new high sensitivity method for deuterium determination. The analysis can be carried out rapidly and nondestructively. Its minimum detection limit is less than 1 × 10 14 at/cm 2 . The analysis depth in Si can reach 1.2 μ m. The application of this method is shown by the determination of the deuterium content in amorphous silicon films prepared by the glow discharge deposition in SiH 4 and D 2 mixture. These preliminary results also show that the hydrogen in α-Si : H is principally from that in SiH 4 , and that the contribution from hydrogen dilution gas is relatively small.