A method for producing a multilayer thin film of polymer for an electro-optical device as well as multi-layer thin film
1996
A method for manufacturing an electro-optical modulation / switching device using a multilayer thin film of polymer, said method comprising the steps of: Forming a lower electrode (2) on a substrate (1); Forming a lower cladding layer (3) on the lower electrode (2); Photobleaching of the lower clad layer (3) with light of a predetermined intensity and wavelength; Forming a light-wave guide layer (4) on the lower cladding layer (3); Photobleaching of the light wave guide layer (4) with light of a predetermined intensity and wavelength; Forming an upper cladding layer (5) on the light wave guide layer (4); and Forming an upper electrode (6) on the upper cladding layer (5).
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