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Dehydrogenation of BN x :H thin films in the process of high-temperature annealing
Dehydrogenation of BN x :H thin films in the process of high-temperature annealing
1995
Z. L. Akkerman
M. L. Kosinova
Yu. M. Rumyantsev
N.P. Sysoeva
N.I. Fajner
Keywords:
Chemical reaction
Thin film
Chemical kinetics
Nitride
Chemical engineering
Annealing (metallurgy)
Infrared spectroscopy
Dehydrogenation
Materials science
Atmospheric temperature range
Correction
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