Old Web
English
Sign In
Acemap
>
Paper
>
Experimental Study of Sheath Voltage Scaling Laws in Asymmetric RF Capacitive Discharges
Experimental Study of Sheath Voltage Scaling Laws in Asymmetric RF Capacitive Discharges
2014
Milka Nikolic
J. Upadhyay
Lepsha Vuskovic
Svetozar Popovic
Keywords:
Capacitive sensing
Voltage
Electronic engineering
Scaling
Physics
scaling law
Mechanics
Correction
Source
Cite
Save
Machine Reading By IdeaReader
0
References
0
Citations
NaN
KQI
[]