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Enhanced thickness uniformity of large-scale α-Ga2O3 epilayers grown by vertical hot-wall mist chemical vapor deposition
Enhanced thickness uniformity of large-scale α-Ga2O3 epilayers grown by vertical hot-wall mist chemical vapor deposition
2021
Sun-Young Park
Minh-Tan Ha
Kyoung-Ho Kim
Le Van Lich
Yun-Ji Shin
Seong-Min Jeong
Se-Hun Kwon
Si-Young Bae
Keywords:
Chemical vapor deposition
scale
Composite material
Mist
Materials science
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