Pressure sensor (I)
2005
The invention relates to a pressure sensor, the measuring cell (10) having at least one diaphragm (11a, 11b) is housed for protecting the pressure sensitive element (12) and a pressure medium-filled measuring chamber (14a, 14b) is provided in which the pressure sensitive element (12) , For monitoring of the membrane (11a, 11b) for damage, it is proposed in the pressure-medium-filled measuring chamber at least one surface acoustic wave sensor (15a, 15b, 16a, 16b) to dispose. In case of damage of the membrane (11a, 11b) is mixed process medium with the pressure medium. For a substance to change is caused in the sensitive region of the surface acoustic wave sensor, which is reflected in a different signal propagation time. Any period change is an indication of damage to the pressure sensor and as such signaled.
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