Fabrication of field emitters of ultra-nano-crystalline and micro-crystalline diamond films by the MPECVD method

Wen-Hsiu Cheng,Ping-Huan Tsai,Yi-Hung Chen,Hung-Yin Tsai,Robert Andok

Fabrication of field emitters of ultra-nano-crystalline and micro-crystalline diamond films by the MPECVD method

2018

Wen-Hsiu Cheng
Ping-Huan Tsai
Yi-Hung Chen
Hung-Yin Tsai
Robert Andok

Synthesis of ultra-nano-crystalline and micro-crystalline composite diamond (UNCD/MCD) films and lateral emitters comprising UNCD/MCD were grown by using microwave plasma-enhanced chemical vapor de...

Keywords:

Diamond
Nano-
Crystal
Materials science
Composite material
Fabrication
nano crystalline
Nanotechnology
Composite number
Microwave

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