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Overcoming the excessive compressive strain in AlGaN epitaxy by introducing high Si-doping in AlN templates
Overcoming the excessive compressive strain in AlGaN epitaxy by introducing high Si-doping in AlN templates
2020
Chia-Yen Huang
Sebastian Walde
Chia-Lung Tsai
Carsten Netzel
Hsueh-Hsing Liu
Sylvia Hagedorn
Yuh-Renn Wu
Yi-Keng Fu
Markus Weyers
Walde Sebastian
Keywords:
Analytical chemistry
Strain (chemistry)
Template
Epitaxy
Doping
Physics
Optoelectronics
Correction
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