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Electron heating and electronegativity during E-H transition in inductively coupled RF oxygen discharge
Electron heating and electronegativity during E-H transition in inductively coupled RF oxygen discharge
2015
Thomas Wegner
Christian K "ullig
J "urgen Meichsner
Keywords:
Oxygen
Electronegativity
Atomic physics
Electron
Chemistry
Analytical chemistry
electron heating
Materials science
Correction
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