Temperature dependence of Cu20 orientations in the oxidation of Cu （111）/ZnO （0001） by oxygen plasma

The role of temperature on the oxidation dynamics of Cu2O on ZnO (0001) was investigated during the oxidation of Cu (111)/ZnO (0001) by using oxygen plasma as the oxidant. A transition from single crystalline Cu2O (111) orientation to micro-zone phase separation with multiple orientations was revealed when the oxidation temperature increased above 300°C. The experimental results clearly show the effect of the oxidation temperature with the assistance of oxygen plasma on changing the morphology of Cu (111) film and enhancing the lateral nucleation and migration abilities of cuprous oxides. A vertical top-down oxidation mode and a lateral migration model were proposed to explain the different nucleation and growth dynamics of the temperature-dependent oxidation process in the oxidation of Cu (111)/ZnO (0001).