Multilayer silicon nitride-on-silicon integrated photonic platform for 3D photonic circuits
2016
A photonic platform with two passive silicon nitride layers atop an active silicon layer is demonstrated. It supports ultra-low loss ( π L of 2.6 V-mm.
Keywords:
- Correction
- Source
- Cite
- Save
- Machine Reading By IdeaReader
11
References
11
Citations
NaN
KQI