Multilayer silicon nitride-on-silicon integrated photonic platform for 3D photonic circuits

Wesley D. Sacher,Zheng Yong,Jared C. Mikkelsen,Antoine Bois,Yisu Yang,Jason C. C. Mak,Patrick Dumais,Dominic Goodwill,Chaoxuan Ma,Junho Jeong,Eric Bernier,Joyce K. S. Poon

Multilayer silicon nitride-on-silicon integrated photonic platform for 3D photonic circuits

2016

Wesley D. Sacher
Zheng Yong
Jared C. Mikkelsen
Antoine Bois
Yisu Yang
Jason C. C. Mak
Patrick Dumais
Dominic Goodwill
Chaoxuan Ma
Junho Jeong
Eric Bernier
Joyce K. S. Poon

A photonic platform with two passive silicon nitride layers atop an active silicon layer is demonstrated. It supports ultra-low loss ( π L of 2.6 V-mm.

Keywords:

Photonic integrated circuit
Optoelectronics
Physics
Silicon photonics
Silicon bandgap temperature sensor
Silicon nitride
Hybrid silicon laser
Photonics
Silicon on insulator
Silicon

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