The observation of crystalline materials in the scanning electron microscope (SEM)

SUMMARY Contrast effects from electron channelling in crystalline solids can be observed in the scanning electron microscope by the correct choice of operating conditions. The crystallographic symmetry and orientation of specimen areas as small as 1 μm in diameter can be determined, and detailed quantitative information obtained about the density, nature and position of defects contained within the crystal structure. The backscattered, absorbed current and transmitted electron signals may all be used. With anticipated improvements in instrumentation the technique will be capable of providing all the information currently supplied by the more complex procedures of transmission electron microscopy.