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Broad‐Area Photoelectrochemical Etching of n‐Type β‐SiC.
Broad‐Area Photoelectrochemical Etching of n‐Type β‐SiC.
1993
Joseph Shor
R. M. Jun. Osgood
Keywords:
Etching
Inorganic chemistry
Chemistry
photoelectrochemical etching
Correction
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