Chapter 12 – Nucleation, Coalescence, and Film Growth

Vacuum-deposited coatings all start with the nucleation of atoms and then as more atoms arrive the nuclei grow. The nuclei may still move due to coalescence and more nuclei will for in the denuded areas. This chapter describes this process in more detail and explains how pores, gas inclusions, and grain boundaries can affect the properties of the coating. There is also an explanation of how the use of plasma bombardment can change the growth and densify the coating. This growth modification may change the stress within the coating.