A novel method of creating a surface micromachined 3D optical assembly for MEMS-based miniaturized FTIR spectrometers

This paper describes design, fabrication, and characterization of a miniaturized, Fourier transform infrared (FTIR) spectrometer for the detection and identification of toxic or flammable gases. By measuring the absorption by the target material of IR radiation, unambiguous detection and identification can be achieved. The key component of the device is a micromachined Michelson interferometer capable of modulating light in the 2 - 14 μm spectral region. Two major technical achievements associated with developing a MEMS interferometer module are discussed: development of a micromirror assembly having an order of magnitude larger modulation stroke to approach laboratory instrument-grade spectral resolutions; and assembly of monolithic, millimeter-scale optical components using multi-layer surface micromachining techniques to produce an extremely low cost MEMS interferometer, which has an unprecedented optical throughput. We have manufactured and tested the device. Reported optical characterization results include a precisely aligned, static interferogram acquired from an assembled Michelson interferometer using visible light wavelengths, which promises a high sensitivity FTIR spectrometer for its size.