Three-dimensional revolving gear of workpieces of vacuum film coating equipment

The invention relates to a three-dimensional rotation mechanism of a vacuum coating equipment workpiece, which comprises a power input shaft (1-1), a supporting pedestal of a revolution table (1-2), a revolution rotary bearing (1-3), a rotary connecting table (1-4) of a revolution table, the revolution table (1-5); wherein, the revolution table (1-5) is provided with a support bar (13) of a workpiece turntable, an upper bracket (14) is arranged above the support bar (13) of the workpiece turntable; a workpiece bar (4) is connected with the upper bracket (14) by a rotary supporting pedestal (15); the workpiece bar (4) is provided with a workpiece rotation axis (11). The mechanism is characterized in that the revolution table (1-5) is provided with a workpiece rotation and workpiece revolving mechanism, and the rotary connecting table (1-4) of the revolution table is fixedly connected with a rotation gear table (2-2). The mechanism can realize four different moving effects of the workpiece, i.e. revolution, revolution and revolving, revolution and rotation, revolution and rotation and revolving in the vacuum environment, has the advantages of flexibility and diversity as well as improves coating quality and productivity effect.