Flux measurement of a hyperthermal atomic oxygen beam

A method has been developed and is described for measuring the flux of a beam of hyperthermal oxygen atoms using a quadrupole mass spectrometer. The accuracy of this method has been assessed by adsorbing the O atom flux on a Au surface for a specified period of time and quantifying the adsorbed amount using ion scattering spectroscopy and by estimating the oxygen‐atom flux from the electron stimulated desorption parameters used to produce the oxygen‐atom beam.