Computer simulation of crystal growth and void formation

The surface structure and vacancy formation during the growth of thin film have been studied with use of a kinetic Monte Carlo method. By extending Solid-on-Solid model to a model which allows vacancies to form in the film, we investigated both the surface structure and the void structure, and interrelation between them. It is shown that point defects appear in the film when the surface has a layer structure, while large voids consisting of more than one vacant site are formed when the surface becomes rough. The spatial distribution of vacancies is closely related to the surface structure.