Backside surface machining of silicon wafers using a nanosecond Tm:Fiber MOPA system

Lawrence Shah,Tobias Bonhoff,Ashraf F. El-Sherif,Pankaj Kadwani,Martin Gebhardt,Christian Gaida,Ilya Migareev,Martin Richardson

Backside surface machining of silicon wafers using a nanosecond Tm:Fiber MOPA system

2013

Lawrence Shah
Tobias Bonhoff
Ashraf F. El-Sherif
Pankaj Kadwani
Martin Gebhardt
Christian Gaida
Ilya Migareev
Martin Richardson

We report on selective machining of the back surface machining of double-side polished silicon wafers, using a high peak power nanosecond Tm:fiber master oscillator power amplifier with a photonic crystal fiber based power amplifier.

Keywords:

Fiber laser
Amplifier
Nanosecond
Physics
Optics
Photonic-crystal fiber
Hybrid silicon laser
Wafer
Fiber
Silicon
Machining
Optoelectronics

Correction
Source
Cite
Save
Machine Reading By IdeaReader

References

Citations