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Nanoscale Pattern Evolution in Thermal Cl2 Etching of GaAs
Nanoscale Pattern Evolution in Thermal Cl2 Etching of GaAs
2003
J. H. Schmid
Richard Mar
Michael Whitwick
Anders Ballestad
Sebastian Tixier
Thomas Tiedje
Keywords:
Thermal
Nanoscopic scale
Optoelectronics
Etching
Materials science
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