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The epitaxial Si X-ray bolometer and alternative to ion implanted devices.
The epitaxial Si X-ray bolometer and alternative to ion implanted devices.
1992
C. C. Zammit
T. J. Sumner
I. D. Hepburn
Peter A. R. Ade
P. Hutchin
G. Ensell
Keywords:
Solid-state physics
Ion implantation
Epitaxy
Silicon
X-ray
Bolometer
Optoelectronics
Ion
X-ray detector
Materials science
Correction
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