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Tantalum-chromium alloy films as contact materials for a capacitor using Sr{sub 0.9}Bi{sub 2.1}TaâOâ for ferroelectric memories
Tantalum-chromium alloy films as contact materials for a capacitor using Sr{sub 0.9}Bi{sub 2.1}TaâOâ for ferroelectric memories
2000
Ichiro Koiwa
Haruki Yamane
Hiroyo Kobayashi
Keywords:
Alloy
Capacitor
Tantalum
Inorganic chemistry
Ferroelectricity
Chemistry
Chromium
Correction
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