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Radial Error Motion Measurement of Ultraprecision Axes of Rotation With Nanometer Level Precision
Radial Error Motion Measurement of Ultraprecision Axes of Rotation With Nanometer Level Precision
2017
Qiang Shu
Mingzhi Zhu
XingBao Liu
Heng Cheng
Keywords:
Nanometre
Engineering
Optics
motion measurement
radial error
Correction
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