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Mg recoil implantation into GaN with Nitrogen ions (3)
Mg recoil implantation into GaN with Nitrogen ions (3)
2019
Toshikazu Yamada
Hisashi Yamada
Hiroshi Chonan
Noriyuki Taoka
Tokio Takahashi
M. Shimizu
Keywords:
Ion
Nitrogen
Materials science
Inorganic chemistry
Recoil
Correction
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