MEMS-integrated Alvarez metasurface lens (Conference Presentation)

Miniature lenses with tunable focus are essential components for many modern applications involving compact optical systems. In this work, a microscale Alvarez lens fabricated with the integration of microelectromechanical systems (MEMS) and metasurfaces is proposed. Electrical experiment results have proven the micropositioning ability of actuatable Alvarez metasurface platform with high controllability, showing a quadratic dependence of the actuated displacement on the driving voltage. The optical experiment results have verified the simulated possibility of focal tuning with the miniature Alvarez metasurface system. This MEMS-integrated Alvarez metasurface lens is capable to produce fast, precise and reproducible focus tuning with the fabrication process entirely compatible with CMOS technologies, granting it the potential to be integrated with other IC components to create full-function 3D display or sensing systems.