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Development of novel piezoelectric materials for Si-based MEMS application
Development of novel piezoelectric materials for Si-based MEMS application
2012
Hiroshi Funakubo
Shintaro Yasui
Keisuke Yazawa
J. Nagata
Takahiro Oikawa
Hitoshi Morioka
Tomoaki Yamada
Hiroshi Uchida
Keywords:
Microelectromechanical systems
Electronic engineering
Piezoelectricity
Materials science
Optoelectronics
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