A Novel Analytical Model of MEMS Shunt Switch considering Temperature dependency with beam Perforation Effect

In this paper, a novel temperature dependent analytical model of Pull-in Voltage and Switching Time of a Serpentine hinge based MEMS capacitive shunt switch is presented. The proposed model is a novel one and considers the beam perforation, fringing field as well as effect of stiffness simultaneously along with effect of temperature variations and hence is more compact than previously reported work. The model is utilized to analyze the effect of different parameters like actuation voltage, beam metal on contact time of the switch. The analytical results for both the parameters are validated by simulation results obtained from benchmark FEM tool CoventorWare and found to be in close agreement to each other.