Laser-induced single step micro/nanopatterning

Recent achievements in laser-induced surface patterning obtained in our group are summarized. Here, we have employed both a SNOM-type setup and two-dimensional lattices of SiO 2 microspheres formed by self-assembly processes. With the SNOM-type setup we have demonstrated nanoscale photochemical and photothermal etching, mainly of Si in Cl 2 atmosphere. With 2D lattices of microspheres a large number of single features can be generated by a single or a few laser shots. Among the examples presented is the surface patterning by ablation, etching, deposition, and surface modification.