Dielectric thin film element, and an actuator, ink jet head and an ink jet recording apparatus using the same

And controlling the crystal orientation of the dielectric thin film, a dielectric thin film device which can optimize various properties such as electrical properties. The dielectric thin film element (10) includes a substrate (11), the substrate (11) a first electrode (12) formed on the dielectric thin film formed on the first electrode (12) ( and 13), a second electrode formed on the dielectric thin film (13) (14) is made in a state of heating the substrate (11). Material is used having a predetermined thermal expansion coefficient as the material of the substrate (11), the crystal orientation of the dielectric thin film (13) is controlled by the thermal expansion coefficient of the substrate (11).